P

Inventor

DE GEUS RICHARD

US5 patents
⚠️ This page may combine multiple inventors who share the name “DE GEUS RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OBSIDIAN INC

3 patents
US5908530AJun 1, 1999

Apparatus for chemical mechanical polishing

OBSIDIAN INC106 citations97
US5759918AJun 2, 1998

Method for chemical mechanical polishing

OBSIDIAN INC198 citations97
US5938884AAug 17, 1999

Apparatus for chemical mechanical polishing

OBSIDIAN INC80 citations94

APPLIED MATERIALS INC

1 patent
US5337144AAug 9, 1994

Etch rate monitor using collimated light and method of using same

APPLIED MATERIALS INC35 citations92

PRIAM CORP

1 patent
US4595221AJun 17, 1986

Disc transfer device

PRIAM CORP16 citations65