Inventor
JOKERST NAN M
US4 patents
Patents
4 patentsUS5401983AMar 28, 1995
Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices
GEORGIA TECH RES INST506 citations97
US5244818ASep 14, 1993
Processes for lift-off of thin film materials and for the fabrication of three dimensional integrated circuits
GEORGIA TECH RES INST157 citations97
US5286335AFeb 15, 1994
Processes for lift-off and deposition of thin film materials
GEORGIA TECH RES INST110 citations96
US5280184AJan 18, 1994
Three dimensional integrated circuits with lift-off
GEORGIA TECH RES INST71 citations94