Inventor

SAEDA MANABU

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SAEDA MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IWATANI & CO

1 patent

US5421902AJun 6, 1995

Non-plasma cleaning method for semiconductor manufacturing apparatus

IWATANI & CO15 citations66

YOSHINO YU

1 patent

US9416445B2Aug 16, 2016

Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluoride

YOSHINO YU0 citations30