Inventor
SHINOHARA AKIHIRA
JP9 patents
Patents
9 patentsUS5273914ADec 28, 1993
Method of fabricating a CMOS semiconductor devices
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD20 citations81
US5030582AJul 9, 1991
Method of fabricating a CMOS semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD20 citations81
US5726071AMar 10, 1998
Manufacturing method of CMOS transistor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations73
US5686340ANov 11, 1997
Manufacturing method of CMOS transistor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations73
US5618748AApr 8, 1997
Manufacturing method of CMOS transistor with no reduction of punch-through voltage
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations73
US5447872ASep 5, 1995
Manufacturing method of CMOS transistor including heat treatments of gate electrodes and LDD regions at reducing temperatures
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD7 citations73
US5409847AApr 25, 1995
Manufacturing method of CMOS transistor in which heat treatment at higher temperature is done prior to heat treatment at low temperature
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations73
US5498908AMar 12, 1996
Semiconductor apparatus having an n-channel MOS transistor and a p-channel MOS transistor and method for manufacturing the semiconductor apparatus
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations62
US5756382AMay 26, 1998
Manufacturing method of CMOS transistor
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations52