Inventor
SOGA HAJIME
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SOGA HAJIME”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DENSO CORP
7 patentsUS6521538B2Feb 18, 2003
Method of forming a trench with a rounded bottom in a semiconductor device
DENSO CORP127 citations97
US6090718AJul 18, 2000
Dry etching method for semiconductor substrate
DENSO CORP96 citations97
US6469345B2Oct 22, 2002
Semiconductor device and method for manufacturing the same
DENSO CORP55 citations96
US6482701B1Nov 19, 2002
Integrated gate bipolar transistor and method of manufacturing the same
DENSO CORP47 citations92
US6274452B1Aug 14, 2001
Semiconductor device having multilayer interconnection structure and method for manufacturing the same
DENSO CORP52 citations92
US6165862ADec 26, 2000
Method of producing a thin film resistor
DENSO CORP37 citations91
US7354829B2Apr 8, 2008
Trench-gate transistor with ono gate dielectric and fabrication process therefor
DENSO CORP7 citations73