Inventor

NAM SEUNG-HYUNG

KR2 patents

Patents

2 patents

US6361907B1Mar 26, 2002

Exposing method in which different kinds of aligning and exposing apparatuses are used

SAMSUNG ELECTRONICS CO LTD6 citations68

US6444375B1Sep 3, 2002

Method for manufacturing a mask

SAMSUNG ELECTRONICS CO LTD2 citations57