Inventor
SEO DONG-WON
KR4 patents
⚠️ This page may combine multiple inventors who share the name “SEO DONG-WON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JUSUNG ENG CO LTD
3 patentsUS10808315B2Oct 20, 2020
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
JUSUNG ENG CO LTD5 citations80
US11970770B2Apr 30, 2024
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
JUSUNG ENG CO LTD0 citations59
US11371142B2Jun 28, 2022
Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor
JUSUNG ENG CO LTD0 citations59