Inventor
HOLLATZ MARK
DE7 patents
⚠️ This page may combine multiple inventors who share the name “HOLLATZ MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
4 patentsUS6695687B2Feb 24, 2004
Semiconductor substrate holder for chemical-mechanical polishing containing a movable plate
INFINEON TECHNOLOGIES AG18 citations81
US6824451B2Nov 30, 2004
Process for the abrasive machining of surfaces, in particular of semiconductor wafers
INFINEON TECHNOLOGIES AG15 citations79
US6858449B2Feb 22, 2005
Process and device for the abrasive machining of surfaces, in particular semiconductor wafers
INFINEON TECHNOLOGIES AG1 citations47
US7030017B2Apr 18, 2006
Method for the planarization of a semiconductor structure
INFINEON TECHNOLOGIES AG0 citations39