Inventor
ZHOU JIAXIANG
CN5 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU JIAXIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS5979225ANov 9, 1999
Diagnosis process of vacuum failure in a vacuum chamber
APPLIED MATERIALS INC16 citations78
US6349589B1Feb 26, 2002
Diagnosis process of vacuum failure in a vacuum chamber
APPLIED MATERIALS INC7 citations70
US6054862AApr 25, 2000
Vacuum chamber bakeout procedure for preventing ion gauge failure
APPLIED MATERIALS INC13 citations70
US5879467AMar 9, 1999
Cycle purging a vacuum chamber during bakeout process
APPLIED MATERIALS INC15 citations65