Inventor

UENO TOMIKAZU

JP4 patents

⚠️ This page may combine multiple inventors who share the name “UENO TOMIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOTONARI MASAYUKI

2 patents

US8128464B2Mar 6, 2012

Chemical mechanical polishing pad

MOTONARI MASAYUKI5 citations55

US8741008B2Jun 3, 2014

Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method

MOTONARI MASAYUKI1 citations47

IKEDA NORIHIKO

1 patent

US8157877B2Apr 17, 2012

Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and kit for preparing chemical mechanical polishing aqueous dispersion

IKEDA NORIHIKO9 citations79

JSR CORP

1 patent

US8349207B2Jan 8, 2013

Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method for semiconductor device

JSR CORP3 citations51