Inventor

YU CHRIS CHANG

US22 patents

⚠️ This page may combine multiple inventors who share the name “YU CHRIS CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YU CHRIS CHANG

MICRON TECHNOLOGY INC

Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers

Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers

Semiconductor wafer for improved chemical-mechanical polishing over large area features

Method for forming a metallization layer

Semiconductor wafer for improved chemical-mechanical polishing over large area features

Chemical-mechanical planarization machine and method for uniformly planarizing semiconductor wafers

Methods of forming metallization layers and integrated circuits containing such

Method for forming a metallization layer

Method for forming a metallization layer

Method for forming a metallization layer

Metallization layer

Semiconductor manufacturing system for forming metallization layer

ANPAC BIO MEDICAL SCIENCE CO LTD

Micro-devices for disease detection

Micro-devices for disease detection

Micro-devices for disease detection

MOTOROLA INC

Polishing pad for chemical-mechanical polishing of a semiconductor substrate

Process related to a modified polishing pad for polishing

YU CHRIS CHANG

Micro-devices for disease detection

Micro-devices for disease detection

ANJI MICROELECTRONICS SHANGHAI

Composition for removing photoresist layer and method for using it

Chemical mechanical polishing slurries, their applications and method of use thereof

ANJI MICROELECTRONICS CO LTD

Systems and slurries for chemical mechanical polishing