Inventor
LO YUNG-TSUN
TW11 patents
⚠️ This page may combine multiple inventors who share the name “LO YUNG-TSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOSEL VITELIC INC
9 patentsUS5942041AAug 24, 1999
Non-sticking semi-conductor wafer clamp and method of making same
MOSEL VITELIC INC30 citations91
US6190928B1Feb 20, 2001
Method for actually measuring misalignment of via
MOSEL VITELIC INC8 citations71
US5963830AOct 5, 1999
Method of forming a TiN/W barrier layer for a hot Al plug
MOSEL VITELIC INC8 citations71
US6096645AAug 1, 2000
Method of making IC devices having stable CVD titanium nitride films
MOSEL VITELIC INC7 citations68
US6030893AFeb 29, 2000
Chemical vapor deposition of tungsten(W-CVD) process for growing low stress and void free interconnect
MOSEL VITELIC INC15 citations68
US5643632AJul 1, 1997
Tungsten chemical vapor deposition process for suppression of volcano formation
MOSEL VITELIC INC4 citations61
US5908659AJun 1, 1999
Method for reducing the reflectivity of a silicide layer
MOSEL VITELIC INC3 citations58
US5966626AOct 12, 1999
Method for stabilizing a silicon structure after ion implantation
MOSEL VITELIC INC2 citations56
US5804091ASep 8, 1998
Method of preventing defects and particles produced after tungsten etch back
MOSEL VITELIC INC2 citations51