Inventor
TAKASUGA SEIICHI
JP3 patents
Patents
3 patentsUS6339297B1Jan 15, 2002
Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus
NISSIN INC122 citations96
US6184623B1Feb 6, 2001
Method for controlling plasma-generating high frequency power, and plasma generating apparatus
NISSIN INC55 citations93
US6744211B2Jun 1, 2004
Plasma density information measuring method, probe used for measuring plasma density information, and plasma density information measuring apparatus
NISSIN INC18 citations90