Inventor

WATANABE SHUJIRO

JP3 patents

Patents

3 patents

US5660700AAug 26, 1997

Sputter coating power processing portion

ASAHI GLASS CO LTD70 citations95

US6468403B1Oct 22, 2002

Methods for producing functional films

ASAHI GLASS CO LTD46 citations92

US6110328AAug 29, 2000

Method of an apparatus for sputtering

ASAHI GLASS CO LTD23 citations92