Inventor
YANG CHANG-ZIP
KR2 patents
Patents
2 patentsUS6146461ANov 14, 2000
Chemical vapor deposition apparatus having a gas diffusing nozzle designed to diffuse gas equally at all levels
SAMSUNG ELECTRONICS CO LTD37 citations89
US6464930B2Oct 15, 2002
Furnace of apparatus for manufacturing a semiconductor device having a heat blocker for preventing heat loss during the unloading of wafers
SAMSUNG ELECTRONICS CO LTD4 citations59