Inventor
BENOIT DOUGLAS E
US4 patents
Patents
4 patentsUS6365326B1Apr 2, 2002
Pattern density tailoring for etching of advanced lithographic mask
IBM19 citations90
US6521383B2Feb 18, 2003
Pattern density tailoring for etching of advanced lithographic masks
IBM15 citations82
US6287434B1Sep 11, 2001
Plating cell apparatus for x-ray mask fabrication
IBM3 citations57
US6039858AMar 21, 2000
Plating process for x-ray mask fabrication
IBM4 citations57