Inventor
HOJYO YUTAKA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “HOJYO YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS6127683AOct 3, 2000
Electron beam drawing apparatus
HITACHI LTD7 citations71
US6337486B2Jan 8, 2002
Electron beam drawing process and electron beam drawing apparatus
HITACHI LTD2 citations60
US6246064B1Jun 12, 2001
Electron beam drawing apparatus
HITACHI LTD4 citations60
US5972772AOct 26, 1999
Electron beam drawing process
HITACHI LTD4 citations60