Inventor
KNOP ROBERT
US5 patents
Patents
5 patentsUS6333272B1Dec 25, 2001
Gas distribution apparatus for semiconductor processing
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US6508913B2Jan 21, 2003
Gas distribution apparatus for semiconductor processing
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US7053000B2May 30, 2006
System, method and apparatus for constant voltage control of RF generator for optimum operation
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US7033845B2Apr 25, 2006
Phase control of megasonic RF generator for optimum operation
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US7780825B2Aug 24, 2010
Substrate gripper with integrated electrical contacts
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