Inventor
SUGA MITSUO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “SUGA MITSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS5250506AOct 5, 1993
Superconductive switching element with semiconductor channel
HITACHI LTD14 citations73
US6924482B2Aug 2, 2005
Method of inspecting pattern and inspecting instrument
HITACHI LTD5 citations72
US5550389AAug 27, 1996
Superconducting device
HITACHI LTD6 citations62
US7876113B2Jan 25, 2011
Method of inspecting pattern and inspecting instrument
HITACHI LTD0 citations51
US7375538B2May 20, 2008
Method of inspecting pattern and inspecting instrument
HITACHI LTD0 citations51
JEOL LTD
4 patentsUS8030622B2Oct 4, 2011
Specimen holder, specimen inspection apparatus, and specimen inspection method
JEOL LTD9 citations83
US7928380B2Apr 19, 2011
Sample holder, method for observation and inspection, and apparatus for observation and inspection
JEOL LTD9 citations83
US7906760B2Mar 15, 2011
Inspection method and reagent solution
JEOL LTD8 citations83
US7202476B2Apr 10, 2007
Charged-particle beam instrument
JEOL LTD10 citations79