Inventor
NEO YOICHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “NEO YOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS6859060B2Feb 22, 2005
Inspection method of semiconductor device and inspection system
HITACHI LTD14 citations82
US6924482B2Aug 2, 2005
Method of inspecting pattern and inspecting instrument
HITACHI LTD5 citations72
US7876113B2Jan 25, 2011
Method of inspecting pattern and inspecting instrument
HITACHI LTD0 citations51
US7375538B2May 20, 2008
Method of inspecting pattern and inspecting instrument
HITACHI LTD0 citations51