Inventor
OTT JOHN ALBRECHT
US10 patents
Patents
10 patentsUS6524935B1Feb 25, 2003
Preparation of strained Si/SiGe on insulator by hydrogen induced layer transfer technique
IBM250 citations98
US6251751B1Jun 26, 2001
Bulk and strained silicon on insulator using local selective oxidation
IBM239 citations98
US5963817AOct 5, 1999
Bulk and strained silicon on insulator using local selective oxidation
IBM251 citations98
US6475072B1Nov 5, 2002
Method of wafer smoothing for bonding using chemo-mechanical polishing (CMP)
IBM86 citations97
US6805962B2Oct 19, 2004
Method of creating high-quality relaxed SiGe-on-insulator for strained Si CMOS applications
IBM52 citations96
US7183576B2Feb 27, 2007
Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD
IBM14 citations92
US6750119B2Jun 15, 2004
Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD
IBM22 citations92
US7285473B2Oct 23, 2007
Method for fabricating low-defect-density changed orientation Si
IBM11 citations81
US6908866B2Jun 21, 2005
Epitaxial and polycrystalline growth of Si1-x-yGexCy and Si1-yCy alloy layers on Si by UHV-CVD
IBM6 citations73
US7550369B2Jun 23, 2009
Method for fabricating low-defect-density changed orientation Si
IBM0 citations50