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Inventor
SUNG MYEON CHANG
KR
4 patents
⚠️ This page may combine multiple inventors who share the name “SUNG MYEON CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DASAN C & I CO LTD
2 patents
US6279650B1
Aug 28, 2001
Temperature-Humidity controller for semiconductor equipment and controlling method thereof
DASAN C & I CO LTD
20 citations
87
US6449873B1
Sep 17, 2002
Apparatus and method for dry cleaning of substrates using clusters
DASAN C & I CO LTD
35 citations
86
LG DISPLAY CO LTD
2 patents
US8008851B2
Aug 30, 2011
Organic light emitting display
LG DISPLAY CO LTD
5 citations
59
US7488976B2
Feb 10, 2009
Organic light emitting device
LG DISPLAY CO LTD
2 citations
59