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Inventor
HURST ANN MARIE
US
3 patents
⚠️ This page may combine multiple inventors who share the name “HURST ANN MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MCCONNELL RACHEL DIANNE
1 patent
US8858819B2
Oct 14, 2014
Method for chemical mechanical planarization of a tungsten-containing substrate
MCCONNELL RACHEL DIANNE
4 citations
61
AIR PROD & CHEM
1 patent
US8790521B2
Jul 29, 2014
Combination, method, and composition for chemical mechanical planarization of a tungsten-containing substrate
AIR PROD & CHEM
1 citations
42
MCCONNELL DIANNE RACHEL
1 patent
US8506831B2
Aug 13, 2013
Combination, method, and composition for chemical mechanical planarization of a tungsten-containing substrate
MCCONNELL DIANNE RACHEL
0 citations
31