Inventor
CHOI JAEHYUCK
KR7 patents
⚠️ This page may combine multiple inventors who share the name “CHOI JAEHYUCK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS9703186B2Jul 11, 2017
Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment
SAMSUNG ELECTRONICS CO LTD7 citations81
US10274820B2Apr 30, 2019
Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same
SAMSUNG ELECTRONICS CO LTD1 citations56
US9612528B2Apr 4, 2017
Methods of manufacturing pellicles having graphite layers
SAMSUNG ELECTRONICS CO LTD1 citations47
US9766540B2Sep 19, 2017
Method of forming photomask
SAMSUNG ELECTRONICS CO LTD0 citations45
US9223199B2Dec 29, 2015
Photomask and method of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US10087348B2Oct 2, 2018
Pellicle including a water-soluble adhesive and photomask assembly including the pellicle
SAMSUNG ELECTRONICS CO LTD0 citations41