Inventor
LEE HAN-SHIN
KR5 patents
⚠️ This page may combine multiple inventors who share the name “LEE HAN-SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS9436077B2Sep 6, 2016
Method of fabricating a pellicle frame
SAMSUNG ELECTRONICS CO LTD0 citations47
US7989123B2Aug 2, 2011
Photomask including ion trapping layer and method of manufacturing semiconductor device using the photomask
SAMSUNG ELECTRONICS CO LTD0 citations47
US9341941B2May 17, 2016
Reflective photomask blank, reflective photomask, and integrated circuit device manufactured by using reflective photomask
SAMSUNG ELECTRONICS CO LTD0 citations46
US10087348B2Oct 2, 2018
Pellicle including a water-soluble adhesive and photomask assembly including the pellicle
SAMSUNG ELECTRONICS CO LTD0 citations41