Inventor
LEE HUI GWAN
KR3 patents
Patents
3 patentsUS11577364B2Feb 14, 2023
Conditioner and chemical mechanical polishing apparatus including the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US12233560B2Feb 25, 2025
Automated gas supply system
SAMSUNG ELECTRONICS CO LTD0 citations57
US11904480B2Feb 20, 2024
Automated gas supply system
SAMSUNG ELECTRONICS CO LTD0 citations57