Inventor
DOKAN TAKASHI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “DOKAN TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
16 patentsUS10553407B2Feb 4, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD47 citations97
US11742181B2Aug 29, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD5 citations85
US11476089B2Oct 18, 2022
Control method and plasma processing apparatus
TOKYO ELECTRON LTD7 citations85
US11871503B2Jan 9, 2024
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations73
US11337297B2May 17, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations73
US11170979B2Nov 9, 2021
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD4 citations73
US10622197B2Apr 14, 2020
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations73
US12165842B2Dec 10, 2024
Control method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US11742182B2Aug 29, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US12537172B2Jan 27, 2026
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US11764082B2Sep 19, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11282701B2Mar 22, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11087960B2Aug 10, 2021
Radio frequency power source and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11017985B2May 25, 2021
Plasma processing apparatus, impedance matching method, and plasma processing method
TOKYO ELECTRON LTD0 citations52
US12198962B2Jan 14, 2025
Maintenance device, vacuum processing system, and maintenance method
TOKYO ELECTRON LTD0 citations51
US9870901B2Jan 16, 2018
Method of producing processing condition of plasma processing apparatus, and plasma processing apparatus
TOKYO ELECTRON LTD0 citations41