Inventor
LI XIAOPU
US9 patents
Patents
9 patentsUS11823871B2Nov 21, 2023
Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool
APPLIED MATERIALS INC2 citations70
US12224156B2Feb 11, 2025
Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool
APPLIED MATERIALS INC0 citations62
US11908662B2Feb 20, 2024
Device and method for tuning plasma distribution using phase control
APPLIED MATERIALS INC0 citations62
US12228534B2Feb 18, 2025
Capacitive sensor for monitoring gas concentration
APPLIED MATERIALS INC0 citations61
US11959868B2Apr 16, 2024
Capacitive sensor for monitoring gas concentration
APPLIED MATERIALS INC0 citations61
US12338530B2Jun 24, 2025
Shaped showerhead for edge plasma modulation
APPLIED MATERIALS INC0 citations58
US12061215B2Aug 13, 2024
RF measurement from a transmission line sensor
APPLIED MATERIALS INC0 citations58
US12581880B2Mar 17, 2026
Faraday faceplate
APPLIED MATERIALS INC0 citations57
US11581206B2Feb 14, 2023
Capacitive sensor for chamber condition monitoring
APPLIED MATERIALS INC0 citations49