Inventor
TERAKADO SADAO
JP6 patents
Patents
6 patentsUS6114695ASep 5, 2000
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD62 citations96
US5969357AOct 19, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD43 citations96
US5866904AFeb 2, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD42 citations96
US5594245AJan 14, 1997
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD71 citations96
USD381031SJul 15, 1997
Electron microscope
HITACHI LTD16 citations73
US5350918ASep 27, 1994
Transmission electron microscope
HITACHI LTD1 citations51