Inventor

PU CHI-KING

TW2 patents

Patents

2 patents

US6979868B2Dec 27, 2005

Bypass circuits for reducing plasma damage

UNITED MICROELECTRONICS CORP10 citations71

US6537883B2Mar 25, 2003

Method for reducing plasma damage to a gate oxide of a metal-oxide semiconductor wafer

UNITED MICROELECTRONICS CORP8 citations71