Inventor
SHIRAKAWABE YOSHIHARU
JP25 patents
⚠️ This page may combine multiple inventors who share the name “SHIRAKAWABE YOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO INSTR INC
14 patentsUS6469293B1Oct 22, 2002
Multiprobe and scanning probe microscope
SEIKO INSTR INC28 citations92
US6422069B1Jul 23, 2002
Self-exciting and self-detecting probe and scanning probe apparatus
SEIKO INSTR INC41 citations92
US6383823B1May 7, 2002
Probe for scanning probe microscope (SPM) and SPM device
SEIKO INSTR INC26 citations92
US6211540B1Apr 3, 2001
Semiconductor strain sensor and scanning probe microscope using the semiconductor strain sensor
SEIKO INSTR INC22 citations92
US6171437B1Jan 9, 2001
Semiconductor manufacturing device
SEIKO INSTR INC27 citations92
US6667467B2Dec 23, 2003
Microprobe and scanning probe apparatus having microprobe
SEIKO INSTR INC30 citations91
US6388252B1May 14, 2002
Self-detecting type of SPM probe and SPM device
SEIKO INSTR INC16 citations84
US6664540B2Dec 16, 2003
Microprobe and sample surface measuring apparatus
SEIKO INSTR INC14 citations83
US6405583B1Jun 18, 2002
Correlation sample for scanning probe microscope and method of processing the correlation sample
SEIKO INSTR INC16 citations83
US6049115AApr 11, 2000
Scanning probe microscope, and semiconductor distortion sensor for use therein
SEIKO INSTR INC12 citations74
US5992225ANov 30, 1999
Cantilever probe and scanning type probe microscope utilizing the cantilever probe
SEIKO INSTR INC10 citations74
US7456400B2Nov 25, 2008
Scanning probe microscope and scanning method
SEIKO INSTR INC7 citations72
US7823470B2Nov 2, 2010
Cantilever and cantilever manufacturing method
SEIKO INSTR INC3 citations62
US6294099B1Sep 25, 2001
Method of processing circular patterning
SEIKO INSTR INC2 citations58
SII NANOTECHNOLOGY INC
6 patentsUS6953519B2Oct 11, 2005
Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus
SII NANOTECHNOLOGY INC15 citations92
US6932504B2Aug 23, 2005
Heated self-detecting type cantilever for atomic force microscope
SII NANOTECHNOLOGY INC12 citations84
US6941798B2Sep 13, 2005
Scanning probe microscope and operation method
SII NANOTECHNOLOGY INC18 citations83
US7337656B2Mar 4, 2008
Surface characteristic analysis apparatus
SII NANOTECHNOLOGY INC4 citations63
US7476418B2Jan 13, 2009
Method for fabricating nanometer-scale structure
SII NANOTECHNOLOGY INC1 citations51
US7494575B2Feb 24, 2009
Method for manufacturing a split probe
SII NANOTECHNOLOGY INC0 citations50
NAKAYAMA YOSHIKAZU
3 patentsUS6787769B2Sep 7, 2004
Conductive probe for scanning microscope and machining method using the same
NAKAYAMA YOSHIKAZU21 citations92
US6705154B2Mar 16, 2004
Cantilever for vertical scanning microscope and probe for vertical scan microscope
NAKAYAMA YOSHIKAZU20 citations92
US7398678B2Jul 15, 2008
Probe for a scanning microscope
NAKAYAMA YOSHIKAZU4 citations61