Inventor

PAN JENG-YANG

TW5 patents

⚠️ This page may combine multiple inventors who share the name “PAN JENG-YANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

4 patents

US6881675B2Apr 19, 2005

Method and system for reducing wafer edge tungsten residue utilizing a spin etch

TAIWAN SEMICONDUCTOR MFG11 citations72

US6875705B2Apr 5, 2005

Method of high selectivity wet etching of salicides

TAIWAN SEMICONDUCTOR MFG4 citations59

US6530103B2Mar 11, 2003

Method and apparatus for eliminating wafer breakage during wafer transfer by a vacuum pad

TAIWAN SEMICONDUCTOR MFG3 citations57

US6794615B2Sep 21, 2004

Semiconductor wafer tray positioning

TAIWAN SEMICONDUCTOR MFG1 citations46

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9647090B2May 9, 2017

Surface passivation for germanium-based semiconductor structure

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50