Inventor

OWEN DAVID M

US2 patents

⚠️ This page may combine multiple inventors who share the name “OWEN DAVID M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CALIFORNIA INST OF TECHN

1 patent

US6469788B2Oct 22, 2002

Coherent gradient sensing ellipsometer

CALIFORNIA INST OF TECHN60 citations93

ULTRATECH INC

1 patent

US9935022B2Apr 3, 2018

Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry

ULTRATECH INC3 citations65