Inventor

HENMI Mitsunori

JP2 patents

Patents

2 patents

US9985196B2May 29, 2018

Multi-layered film and method of manufacturing the same

ULVAC INC0 citations45

US10553777B2Feb 4, 2020

Multi-layered film, method of manufacturing the same, and manufacturing apparatus of the same

ULVAC INC0 citations32