Inventor

FUKUMOTO KANAKO

JP3 patents

Patents

3 patents

US10011553B2Jul 3, 2018

Method for producing dry etching gas

DAIKIN IND LTD0 citations48

US9919990B2Mar 20, 2018

Method for manufacturing methyl fluoride

DAIKIN IND LTD0 citations48

US9688797B2Jun 27, 2017

Surface treatment agent

DAIKIN IND LTD0 citations38