Inventor

PAN ZHIYU

US20 patents

⚠️ This page may combine multiple inventors who share the name “PAN ZHIYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PAN ZHIYU

BOSCH GMBH ROBERT

MEMS resonator array structure and method of operating and using same

Tri-axis accelerometer having a single proof mass and fully differential output signals

MEMS resonator array structure

Breath-mode ring resonator structure, and method of designing, operating and using same

MEMS resonator array structure and method of operating and using same

MEMS resonator structure and method

Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement

Microelectromechanical devices and fabrication methods

Differential in-plane tunneling current sensor

Device and method for electrostatically levitating a disk and method for using an electrostatic levitated disk as a sensor

Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action

Apparatus, method and system for providing enhanced mechanical protection for thin beams

Differential in-plane tunneling current sensor

PAN ZHIYU

Tri-axis accelerometer having a single proof mass and fully differential output signals

Bait chasing system

Tri-axis accelerometer having a single proof mass and fully differential output signals

LUTZ MARKUS

MEMS resonator array structure and method of operating and using same

MEMS resonator structure including regions with different densities and method

UNIV CARNEGIE MELLON

Method of fabricating microstructures and devices made therefrom

UNIV LELAND STANFORD JUNIOR

In-plane mechanically coupled microelectromechanical tuning fork resonators