Inventor
RUDA KRZYSZTOF
PL4 patents
Patents
4 patentsUS12148601B2Nov 19, 2024
Method of plasma processing a substrate in a plasma chamber and plasma processing system
TRUMPF HUETTINGER SP Z O O0 citations55
US11929233B2Mar 12, 2024
Method of adjusting the output power of a power supply supplying electrical power to a plasma, plasma apparatus and power supply
TRUMPF HUETTINGER SP Z O O0 citations47
US11538670B2Dec 27, 2022
Controlling multiple plasma processes
TRUMPF HUETTINGER SP Z O O0 citations45
US11430642B2Aug 30, 2022
Controlling multiple plasma processes
TRUMPF HUETTINGER SP Z O O0 citations44