Inventor
TAMORI TOMOHIRO
JP4 patents
Patents
4 patentsUS11353798B2Jun 7, 2022
Pattern measurement device and pattern measurement method
HITACHI HIGH TECH CORP2 citations71
US10816332B2Oct 27, 2020
Pattern measurement device and pattern measurement method
HITACHI HIGH TECH CORP3 citations71
US12174551B2Dec 24, 2024
Pattern measurement device and pattern measurement method
HITACHI HIGH TECH CORP0 citations61
US10141159B2Nov 27, 2018
Sample observation device having a selectable acceleration voltage
HITACHI HIGH TECH CORP0 citations38