Inventor
OHUE MICHIO
JP15 patents
Patents
15 patentsUS5629888AMay 13, 1997
Semiconductor memory device and method of operation thereof
HITACHI LTD42 citations96
US5496410AMar 5, 1996
Plasma processing apparatus and method of processing substrates by using same apparatus
HITACHI LTD65 citations96
US5307304AApr 26, 1994
Semiconductor memory device and method of operation thereof
HITACHI LTD83 citations96
US5211825AMay 18, 1993
Plasma processing apparatus and the method of the same
HITACHI LTD70 citations96
US5936832AAug 10, 1999
Semiconductor memory device and method of operation thereof
HITACHI LTD22 citations92
US5178962AJan 12, 1993
Metal-organic macromolecular synthetic resin composite and process for producing the same
HITACHI LTD35 citations92
US5162633ANov 10, 1992
Microwave-excited plasma processing apparatus
HITACHI LTD27 citations92
US5084355AJan 28, 1992
Laminar structure comprising organic material and inorganic material
HITACHI LTD30 citations92
US5745336AApr 28, 1998
Capacitor for semiconductor integrated circuit
HITACHI LTD36 citations90
US5434742AJul 18, 1995
Capacitor for semiconductor integrated circuit and method of manufacturing the same
HITACHI LTD23 citations90
US5347100ASep 13, 1994
Semiconductor device, process for the production thereof and apparatus for microwave plasma treatment
HITACHI LTD13 citations73
US5182495AJan 26, 1993
Plasma processing method and apparatus using electron cyclotron resonance
HITACHI LTD13 citations73
US5107307AApr 21, 1992
Semiconductor device for control of light
HITACHI LTD8 citations73
US5233216AAug 3, 1993
Dielectric isolated substrate and process for producing the same
HITACHI LTD9 citations68
US6940741B2Sep 6, 2005
Semiconductor memory device and methods of operation thereof
HITACHI LTD3 citations63