P

Inventor

LOWISCH MARTIN

DE6 patents
⚠️ This page may combine multiple inventors who share the name “LOWISCH MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

3 patents
US7557902B2Jul 7, 2009

Projection objective

ZEISS CARL SMT AG10 citations81
US7572556B2Aug 11, 2009

Masks, lithography device and semiconductor component

ZEISS CARL SMT AG3 citations61
US7576934B2Aug 18, 2009

Groupwise corrected objective

ZEISS CARL SMT AG0 citations38

ASML NETHERLANDS BV

1 patent
US7042550B2May 9, 2006

Device manufacturing method and computer program

ASML NETHERLANDS BV8 citations71

MANN HANS-JUERGEN

1 patent
US8268518B2Sep 18, 2012

Method and lithography device with a mask reflecting light

MANN HANS-JUERGEN0 citations51

ZEISS CARL SMT GMBH

1 patent
US7914955B2Mar 29, 2011

Masks, lithography device and semiconductor component

ZEISS CARL SMT GMBH0 citations51