Inventor
DIERICHS MARCEL MATHIJS THEODO
NL21 patents
Patents
21 patentsUS7317504B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV114 citations98
US7326522B2Feb 5, 2008
Device manufacturing method and a substrate
ASML NETHERLANDS BV97 citations97
US6927004B2Aug 9, 2005
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV100 citations97
US7259827B2Aug 21, 2007
Diffuser unit, lithographic apparatus, method for homogenizing a beam of radiation, a device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV29 citations92
US7247866B2Jul 24, 2007
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV16 citations92
US7148952B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV24 citations89
US7277158B2Oct 2, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations84
US7224430B2May 29, 2007
Optical component, optical system including such an optical component, lithographic apparatus, method of correcting apodization in an optical system, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV12 citations84
US7175968B2Feb 13, 2007
Lithographic apparatus, device manufacturing method and a substrate
ASML NETHERLANDS BV15 citations84
US6771352B2Aug 3, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations84
US7362413B2Apr 22, 2008
Uniformity correction for lithographic apparatus
ASML NETHERLANDS BV12 citations83
US7170587B2Jan 30, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV11 citations83
US7206059B2Apr 17, 2007
Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
ASML NETHERLANDS BV9 citations73
US7113261B2Sep 26, 2006
Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US7042550B2May 9, 2006
Device manufacturing method and computer program
ASML NETHERLANDS BV8 citations71
US7697116B2Apr 13, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations62
US7333178B2Feb 19, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US7108960B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US7023524B2Apr 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations62
US6987275B2Jan 17, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations62
US7224440B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations41