Inventor

VAN INGEN SCHENAU KOEN

NL9 patents

⚠️ This page may combine multiple inventors who share the name “VAN INGEN SCHENAU KOEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents

US7736820B2Jun 15, 2010

Anti-reflection coating for an EUV mask

ASML NETHERLANDS BV9 citations84

US7443486B2Oct 28, 2008

Method for predicting a critical dimension of a feature imaged by a lithographic apparatus

ASML NETHERLANDS BV13 citations81

US7042550B2May 9, 2006

Device manufacturing method and computer program

ASML NETHERLANDS BV8 citations71

US7307687B2Dec 11, 2007

Lithographic apparatus, device manufacturing method and substrate

ASML NETHERLANDS BV2 citations57

US7088421B2Aug 8, 2006

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV0 citations50

VAN INGEN SCHENAU KOEN

2 patents

US9052605B2Jun 9, 2015

Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameter

VAN INGEN SCHENAU KOEN10 citations81

US8304180B2Nov 6, 2012

Lithographic apparatus and device manufacturing method

VAN INGEN SCHENAU KOEN2 citations50

VAN SCHOOT JAN BERNARD PLECHELMUS

1 patent

US9170500B2Oct 27, 2015

Lithographic apparatus and device manufacturing method with corrective positioning of reflective element

VAN SCHOOT JAN BERNARD PLECHELMUS10 citations81

LOOPSTRA ERIK ROELOF

1 patent

US9134629B2Sep 15, 2015

Illumination system, lithographic apparatus and method of forming an illumination mode

LOOPSTRA ERIK ROELOF0 citations51