Inventor
LEENDERS MARTINUS HENDRIKUS AN
NL22 patents
Patents
22 patentsUS6614505B2Sep 2, 2003
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV99 citations97
US6781673B2Aug 24, 2004
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV56 citations94
US7411657B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV30 citations92
US6741329B2May 25, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV30 citations92
US6678037B2Jan 13, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV32 citations92
US7468779B2Dec 23, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations84
US7420194B2Sep 2, 2008
Lithographic apparatus and substrate edge seal
ASML NETHERLANDS BV10 citations84
US6956222B2Oct 18, 2005
Lithographic apparatus and method of manufacturing a device
ASML NETHERLANDS BV16 citations84
US6940587B2Sep 6, 2005
Lithographic apparatus and a measurement system
ASML NETHERLANDS BV17 citations84
US6879374B2Apr 12, 2005
Device manufacturing method, device manufactured thereby and a mask for use in the method
ASML NETHERLANDS BV13 citations84
US7265366B2Sep 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations83
US7119886B2Oct 10, 2006
Lithographic apparatus, device manufacturing method, and angular encoder
ASML NETHERLANDS BV19 citations83
US7116399B2Oct 3, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV8 citations73
US6930760B2Aug 16, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV10 citations73
US6862075B2Mar 1, 2005
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
ASML NETHERLANDS BV8 citations73
US7633073B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US7095479B2Aug 22, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations72
US6977713B2Dec 20, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations72
US7042550B2May 9, 2006
Device manufacturing method and computer program
ASML NETHERLANDS BV8 citations71
US7170580B2Jan 30, 2007
Lithographic apparatus, projection system, method of projecting and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7423733B2Sep 9, 2008
Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device
ASML NETHERLANDS BV4 citations61
US7177009B2Feb 13, 2007
Position determination method and lithographic apparatus
ASML NETHERLANDS BV1 citations46