Inventor
KINNEY PATRICK D
US14 patents
⚠️ This page may combine multiple inventors who share the name “KINNEY PATRICK D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS5422724AJun 6, 1995
Multiple-scan method for wafer particle analysis
APPLIED MATERIALS INC56 citations95
US5985680ANov 16, 1999
Method and apparatus for transforming a substrate coordinate system into a wafer analysis tool coordinate system
APPLIED MATERIALS INC60 citations94
US5267017ANov 30, 1993
Method of particle analysis on a mirror wafer
APPLIED MATERIALS INC48 citations92
US6122562ASep 19, 2000
Method and apparatus for selectively marking a semiconductor wafer
APPLIED MATERIALS INC43 citations91
US5870187AFeb 9, 1999
Method for aligning semiconductor wafer surface scans and identifying added and removed particles resulting from wafer handling or processing
APPLIED MATERIALS INC16 citations71