Inventor
TINER PAUL
US2 patents
Patents
2 patentsUS6423648B2Jul 23, 2002
Controllable oxidation technique for the formation of high-quality ultra-thin gate oxide using carbon dioxide as the oxidizing agent
TEXAS INSTRUMENTS INC3 citations59
US6352941B1Mar 5, 2002
Controllable oxidation technique for high quality ultrathin gate oxide formation
TEXAS INSTRUMENTS INC4 citations59