Inventor
LI SI YI
US5 patents
Patents
5 patentsUS6670278B2Dec 30, 2003
Method of plasma etching of silicon carbide
LAM RES CORP54 citations94
US7166535B2Jan 23, 2007
Plasma etching of silicon carbide
LAM RES CORP11 citations83
US6875699B1Apr 5, 2005
Method for patterning multilevel interconnects
LAM RES CORP15 citations82
US6919278B2Jul 19, 2005
Method for etching silicon carbide
LAM RES CORP10 citations73
US7311852B2Dec 25, 2007
Method of plasma etching low-k dielectric materials
LAM RES CORP6 citations60