Inventor

HUNG HOIMAN RAYMOND

US5 patents

⚠️ This page may combine multiple inventors who share the name “HUNG HOIMAN RAYMOND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US6602434B1Aug 5, 2003

Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window

APPLIED MATERIALS INC280 citations98

US6544429B1Apr 8, 2003

Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition

APPLIED MATERIALS INC15 citations81

US8043933B2Oct 25, 2011

Integration sequences with top surface profile modification

APPLIED MATERIALS INC1 citations52

(unassigned)

2 patents

US6797189B2Sep 28, 2004

Enhancement of silicon oxide etch rate and nitride selectivity using hexafluorobutadiene or other heavy perfluorocarbon

217 citations97

US6800213B2Oct 5, 2004

Precision dielectric etch using hexafluorobutadiene

11 citations72