Inventor
FILOSI PETER L
US3 patents
Patents
3 patentsUS6859260B2Feb 22, 2005
Method and system for improving focus accuracy in a lithography system
ASML HOLDING NV12 citations81
US7248336B2Jul 24, 2007
Method and system for improving focus accuracy in a lithography system
ASML HOLDING NV1 citations60
US7053984B2May 30, 2006
Method and systems for improving focus accuracy in a lithography system
ASML HOLDING NV3 citations60