Inventor
VOSTERS PETRUS MATTHIJS HENRIC
NL11 patents
Patents
11 patentsUS6906786B2Jun 14, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV23 citations90
US7292317B2Nov 6, 2007
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating
ASML NETHERLANDS BV13 citations84
US7417711B2Aug 26, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations73
US7239369B2Jul 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations73
US7064808B1Jun 20, 2006
Substrate carrier and method for making a substrate carrier
ASML NETHERLANDS BV10 citations73
US6995379B2Feb 7, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV2 citations60
US6815699B2Nov 9, 2004
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US7256867B2Aug 14, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7230254B2Jun 12, 2007
Movable carriage for a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7072025B2Jul 4, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US6970230B2Nov 29, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37