Inventor
TOYODA MITSUNORI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “TOYODA MITSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
9 patentsUS6913373B2Jul 5, 2005
Optical illumination device, exposure device and exposure method
NIKON CORP136 citations98
US6741394B1May 25, 2004
Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus
NIKON CORP63 citations96
US7095560B2Aug 22, 2006
Diffractive optical device, refractive optical device, illumination optical system, exposure apparatus and exposure method
NIKON CORP44 citations92
US7379160B2May 27, 2008
Optical integrator, illumination optical device, exposure apparatus, and exposure method
NIKON CORP7 citations73
US10025194B2Jul 17, 2018
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US9513558B2Dec 6, 2016
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US8749759B2Jun 10, 2014
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US7618767B2Nov 17, 2009
Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method
NIKON CORP2 citations61
US7307693B2Dec 11, 2007
Illumination optical device, photolithography machine, and exposure method
NIKON CORP0 citations51
NISHINAGA HISASHI
2 patentsTOYODA MITSUNORI
2 patentsUS9164209B2Oct 20, 2015
Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power having different thicknesses to rotate linear polarization direction
TOYODA MITSUNORI5 citations81
US10281632B2May 7, 2019
Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction
TOYODA MITSUNORI1 citations70